Karl Suss MJB3 UV400
Capabilities Description
The SUSS MJB3 UV400 is a mask aligner and exposure tool designed to handle substrates of various sizes up to 3 inches in diameter. The MJB3 is equipped with a 350 W mercury short-arc lamp with primary exposure wavelengths of 350 – 450 nm and enabling 0.6 micron resolution. The alignment accuracy is 0.1 microns. It can perform exposures in vacuum contact, hard contact, soft contact, and proximity mode.
Accessories and Specifications:
- Configured for Top Side Alignment
- Vacuum, Hard, and Soft contact modes available
- Suss CIC500 UV Power Supply
- 350 Watt lamp-house
- UV400 Exposure Optics (365nm and 405nm)
- Suss M400 Binocular Head Microscope
- Objectives: 5x,10x, 20x
- 10x eyepieces
- XY Manipulator
- Suss 15W incandescent illuminator
- 4 inch Maskholder
- 3 inch Wafer Chuck
- Suss Model UV1000 Intensity Meter
Access Training
Members are required to demonstrate knowledge and proficiency in operation of the MJB3 to obtain access. The steps to obtain authorized access are as follows:
- Read the following documentation:
- MJB3 Operator’s Manual
- MJB3 Quick Guide
- MJB3 Standard Operating Procedure
- Pass MJB3 Knowledge Exam
- Obtain training Authorized User
- Note: The Nanofabrication course counts as training but proficiency must still be demonstrated.
- Demonstrate proficient operation of MJB3 to Authorized User
Reservations
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Documentation